Super-resist combine cross linkers in low concentration (left) enabling shorter exposure times than with high concentrations of cross linkers (right).
FULL ARTICLE
Thursday, July 17, 2014
#MATERIALS: "Super-resists Enable EUV to Reach 10-nm Node"
To get to the 10-nanometer node circa 2017 most semiconductor makers are still banking on EUV, which need special super-resists like the one described here to be successful: R. Colin Johnson @NextGenLog
Super-resist combine cross linkers in low concentration (left) enabling shorter exposure times than with high concentrations of cross linkers (right).
FULL ARTICLE
Super-resist combine cross linkers in low concentration (left) enabling shorter exposure times than with high concentrations of cross linkers (right).
FULL ARTICLE