#CHIPS: "Intel/SRC Cut Fabricate Cost/Time"

As semiconductor makers progress to smaller scales contamination is becoming an increasingly ever-present problem, necessitating the use of expensive ultra-pure gases to purge systems between each fabrication step. Now the Semiconductor Research Corp. (SRC) together with Intel, which built a test bed, have crated a new "greener" purging technique to solve the problem for SRC member companies (which include Intel, IBM, GlobalFoundries and many more): R. Colin Johnson @NextGenLog

Using its pressure cyclic purge (PCP) technique (see graphic at left) the ultra-pure gases that purge a gas distribution system are greatly conserved.

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