#MEMS "ADI ups ante in high-precision gyroscopes"

Already known for its high-precision micro-electro-mechanical system (MEMS) accelerometers, gyroscopes and complete inertial navigation units (IMUs), Analog Devices Inc. (ADI) has upped the ante for high-precision with its invention of quad-differential iMEMS gyros, which combine four separate sensing elements to cancel out the effects of vibration, noise and other environmental stimuli. Look for ultra-precise MEMS sensors to revolutionize automotive crash prevention over the next five years. R. Colin Johnson @NextGenLog


ADI's new ADXRS64x quad-differential iMEMS gyroscope family uses four separate proof masses (upper left, upper right and lower left, lower right) to cancel out the effects of vibration, noise and other environmental stimuli.

Here is what my EETimes story says about high-precision gyros: MEMS gyroscopes use a vibrating "proof mass" suspended on silicon springs which harnesses the Coriolis effect to detect rotation orthogonal to its motion with capacitive sensors around its edges. Unfortunately, vibration, shock and excessive linear acceleration can fool a single proof mass into falsely reporting rotational motion. To cancel out these effects, ADI already had dual-differential proof masses on its previous high-precision gyros, but now has taken a significant step forward by going quad...
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