EUV: tabletop system generates extreme-UV laser light
Margaret Murnane describes a small, inexpensive tabletop laser system that can produce coherent extreme-ultraviolet laser light has been built by a research team at the University of Colorado. The system uses a hollow optical fiber filled with argon gas as a nonlinear optical waveguide that upconverts visible laser light into the extreme-ultraviolet range � a critical part of the spectrum for advanced lithography systems.
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Story in EE Times: http://www.eet.com/at/news/OEG20020730S0041