#MEMS: "IDT claims first piezoelectric MEMs"

Integrated Device Technology Inc. (IDT) said Wednesday (Nov. 30) it has developed what it claims is the world's first piezoelectric micro-electro-mechanical system (pMEMS).

IDT (San Jose, Calif.) also claimed its new pMEMS process could produce oscillators that operated at higher-frequencies than traditional MEMS, had higher-stability than quartz oscillators, and could be delivered in the world's smallest waferscale package.
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