"MEMS: Oak Ridge claims sensitivity record for Si MEMS sensor"
Now that it has proved the concept of a "small, vibrating nose" built as a silicon microelectromechanical system, Oak Ridge National Laboratory in Tennessee has set itself the task of seeing how small an amount of substance the MEMS design can detect. "From our calculations, we believe that we can make it sensitive to the mass change of a single molecule," said researcher Panos Datskos.
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Text: http://www.eetimes.com/story/OEG20030623S0061