"MEMS: UK firm helps bring MEMS to volume production"
Bringing microelectromechanical systems (MEMS) into mainstream manufacturing has been the goal over the last two years for Surfaced Technology Systems, which created a family of plasma etch and deposition tools to speed the process. STS (Newport, England) said its "Pro" tools lower the cost-per-wafer of MEMS designs for volume production, by streamlining the use of anisotropic deep etched structures in silicon.
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Text: http://www.eetimes.com/story/OEG20030619S0041