Researchers at the University of Texas are claiming the world's fastest silicon photonic waveguide, which achieved a 1,000-fold increase in speed combined with lower power consumption than previously demonstrated chips. The photonic waveguide was constructed from a hexagonal lattice photonic crystal with a period of 400 nanometers and an air hole diameter of 220 nanometers. They were patterned using electron-beam lithography and drying etching.
Text: http://www.eetimes.com/showArticle.jhtml?articleID=197006682