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| Invensense's proprietary fabrication process bonds the MEMS chip element to the ASIC in a stacked pair that seals the MEMS element against environmental contamination. |
Micro-electro-mechanical systems (MEMS) vendor Invensense Inc. Tuesday (Nov. 9) introduced the world's first integrated MEMS to include both a gyroscope and accelerometer on a single CMOS die. When used with a magnetometer (compass), the MPU-6000 forms a complete inertial measurement unit (IMU), according to Invensense (Sunnyvale, Calif.) . An integral motion processor core on the chip includes algorithms to fuse the outputs from the accelerometer, gyro and magnetometer to provide nine-degree-of-freedom functionality for applications including smart phones, touchscreen tablets, 3-D TV remote controls, gaming consoles, digital still- and video-cameras.
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