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NIST releases the world's first silicon nano-ruler, which allows semiconductor manufacturers to accurately measure modern semiconductor devices. Nanotechnology is challenging the National Institute of Standards and Technology to downsize its measurement tools, which the agency did recently by releasing the world's first silicon nano-ruler. Designed for the semiconductor microchip manufacturing industry, the silicon nano-ruler is a "calibrated artifact" that is individually measured and certified by NIST for the spacing, angles and orientation of its silicon atoms. The silicon nano-ruler allows semiconductor manufacturers to accurately measure the thickness, crystal structure, embedded strain and orientation of the atoms in modern semiconductor devices.
Text: http://www.smartertechnology.com/c/a/Technology-For-Change/Nanoruler-Measures-Semiconductor-Microchip-Features/