Acuity, Inc. (Fremont, Calif.) claims it new low pressure sensor die expands the low-pressure end of Acuity’s piezoresistive pressure sensor line with a 10 mbar full-scale, according to the fabless provider of MEMS pressure sensors. At just 1.9 mm square, the new AC3050’s sensitivity and stability exceed that of much larger traditional low pressure sensor die, according to Acuity, who says its MEMS structures rely on several key process steps which are fabricated on wafers for them under a manufacturing agreement with MEMS foundry Semefab. Look for a migration to MEMS low-pressure sensors over the next few years. R.C.J.
Here is what Acuity says about its new MEMS sensor: Acuity, Incorporated, a fabless provider of stable high-performance MEMS pressure sensors, is now shipping the AC3050-010 very stable low pressure sensor die with a 10mbar full-scale rating. Expanding the low-pressure end of Acuity’s piezoresistive pressure sensor product offerings to 10 mbar full-scale, the AC3050-010 complements the existing AC3030 series 20 to 100 mbar full-scale MEMS pressure sensor family. The AC3050-010 is targeted at low-pressure instrumentation in industrial measurement, medical and HVAC applications.
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